The turbomolecular pumps from Leybold generate a clean high and
ultra-high vacuum, are easy to operate and are exceptionally
reliable. In connection with a well rated backing pump, pressures
below 10-10 mbar (0.75 x 10-10 Torr) can be attained.
Leybold offers two product lines:
1. TURBOVAC line Turbomolecular pumps with mechanical rotor
suspension
2. TURBOVAC MAG line Turbomolecular pumps with magnetic rotor
suspension
Each of the two product lines contains “classic” turbomolecular
pumps as well as turbomolecular pumps with a compound stage.
Leybold is one of the world’s leading manufacturer of turbomolecular
pumps. Consequently, the
TURBOVAC and the TURBOVAC MAG pumps are successfully used in many
applications. A list of the most important ones is given in the
table “Applications” in the section “General”.
Principle of Operation
The turbomolecular pump is a turbine with blades. By the momentum
transfer from the rapidly rotating rotor blades to the gas molecules
their initially non-directed thermal motion is changed to a directed
motion.
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file.
