Product Description
Flexible, vibration-free and low-maintenance turbomolecular pumps with separate frequency converter.
Your Expectations:
- Clean high and ultrahigh vacuum generation
- Robust and reliable in demanding semiconductor processes
- For installation in any orientation
- High forevacuum tolerance
- Long service life
Our Solution:
- Pumping speed up to 3,200 l/s
- Magnetically levitated
- Compound stage versions available
- Stable system performance capability; high pumping speed and high compression ratios for all gases
- Easy system integration
- Temperature management system (TMS)
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