Product Description

Flexible, vibration-free and low-maintenance turbomolecular pumps with separate frequency converter.

Your Expectations:

  • Clean high and ultrahigh vacuum generation
  • Robust and reliable in demanding semiconductor processes
  • For installation in any orientation
  • High forevacuum tolerance
  • Long service life

Our Solution:

  • Pumping speed up to 3,200 l/s
  • Magnetically levitated
  • Compound stage versions available
  • Stable system performance capability; high pumping speed and high compression ratios for all gases
  • Easy system integration
  • Temperature management system (TMS)